3ÈMES JORNADAS HISPANO FRANCESAS CMC2 - IBERNAM
PRESENTACIÓN
PRESENTATION
Remercions nos partenaires, en particulier nos collègues de San Sebastian et l’ensemble de l’équipe de Javier Gracia, pour l’accueil de ces troisièmes journées en collaboration avec le réseau espagnol IBERNAM animé par notre collègue Javier Gutierrez.
Comité organizador
Javier Gutiérrez Monreal (CSIC)
Secretaría
María Alonso (CEIT)
Mª del Castillo Barraza (CSIC)
Apoyo logístico
Isabel Ayerdi
Ana Sancho
Jon Etxeberria
Jaimen Herrán
Fran Sáez (Técnico Informático)
3ÈMES JORNADAS HISPANO FRANCESAS CMC2 - IBERNAM
Micro-Nano Tecnologías
Organizadas por la red española IBERNAM con la colaboración de la red francesa CMC2
9&10 noviembre 2006
CENTRO DE ESTUDIOS E INVESTIGACIONES TECNOLÓGICAS DE GUIPUZKOA (CEIT)
3ÈMES JORNADAS HISPANO FRANCESAS CMC2 - IBERNAM
Micro-Nano Tecnologías
Organizadas por la red española IBERNAM con la colaboración de la red francesa CMC2
9&10 noviembre 2006
CENTRO DE ESTUDIOS E INVESTIGACIONES TECNOLÓGICAS DE GUIPUZKOA (CEIT)
Emilio Lora-Tamayo. UAB – CNMB - Barcelona
Up to now Moore`s law has been a reference in Microelectronics, showing a nice match between predicted performances and industrial results. Device scaling down progress as ITRS demand and the nearly universal CMOS cell appears to reach a barrier during the next decade, concerning technology, physical dimensions and electrical performances. “Beyond Moore” approaches tries to asses other technologies and /or structures, to make a step further. Carbon Nanotubes FETs have been demonstrated, showing very promising results as candidates to take the role of CMOS cells in nanoelectronic circuits. Main results and problems will be discussed on this issue
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Prof. C. Pijolat. Ecole de Mines Saint Etienne
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C. Dejous. IXL Bordeaux
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M. Aleixandre, IFA - CSIC Madrid
In this work we study three kinds of hydrogen sensores based in optical fibers. All the sensores are aimed to its use in nuclear waste repositories so they are expected to detect low concentration of hydrogen. At the same time fast responses are not needed due to the slow generation of hydrogen in such repositories. The first sensor use the fiber as transducer material, the second use a thin film of palladium as transducer and the third use a palladium coated Bragg reflector as transducer. The responses are analyzed and the advantages of each sensor are presented with consideration of the application proposed.
Laboratorio de Sensores, Instituto de Física Aplicada, Serrano 144, Madrid, E28006 Madrid (Spain)
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Dr. E Llobet, Dept. of Electronic Engineering, University Rovira i Virgili, Tarragona, Spain
In this project we will exploit a new road to chemical sensors that consist of using multiwall carbon nanotubes decorated with metal or metal oxide nanoclusters. The surfaces of the clusters serve as reactive sites for gas adsorption. Small clusters donate or accept a significant amount of charge upon the adsorption of target gas molecules so electron transport in the nanotube is affected. Here we will report on the techniques employed to decorate the nanotubes and show the results of XPS and TEM analysis run on metal-decorated nanotubes. Finally, we will review some preliminary results on their gas sensing properties.
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F. Arregui, I. Matías. UPN - Pamplona
The Layer-by-Layer Electrostatic Self-Assembly method (LbL-ESA) is a technique that has been successfully tested for the deposition of nanostructured coatings on glass, silicon, polymer or metallic substrates. This technique allows to control the individual layer composition and the thickness of the coatings on the nanometer scale. The molecular species of the nanolayered structures and the long-range physical order of the layers determine the resulting coating properties. Combining the proper materials it is possible to build up sensitive coatings onto optical fibers for the measurement of humidity, harmful gases, volatile organic compounds, pH, biological species and others
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Dr. P. Menini, LAAS CNRS Toulouse
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Nicolás Medrano-Marqués and Santiago Celma-Pueyo. Group of Electronic Design – Mixed-Signal ASIC Design Center
Aragón Institute for Engineering Research (I3A) University of Zaragoza. Zaragoza - Spain {nmedrano, scelma}@unizar.es
The importance of monitoring environment and agriculture has never been higher. From agricultural operators to biological researchers, all need to make reliable, sensitive measurements in remote or dispersed locations. In consequence, wireless solutions and low-cost MEMs based sensor capabilities enable breakthrough environmental monitoring performance are continuously being demanded. In these open environments, and especially in agriculture, the ability to deliver fine measurements over a range of analytical sensor inputs humidity, barometric pressure, soil moisture, for example - is critical for both monitoring, alerting and control scenarios. The need to deploy sensors ad-hoc, conforming to the cultivation environment and covering very wide areas is also critical. These remote sensor deployments must also deliver reliable communication at low power levels. Finally, the ability to aggregate data and communicate in real time can mean the difference between a successful or unsuccessful agricultural exploitation. Wireless sensor networks which can accommodate multi-mode sensors, are location-aware, and utilize multi-hop, mesh networking provide breakthrough performance and cost improvement compared to manual approaches.
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Jon A. Etxeberria, Javier Gracia, CEIT S. Sebastián
This work describes the design, fabrication and characterization of a MEMS parallel plate tunable capacitor for RF applications. The fabrication process is based on well known DRIE and anodic bonding processes. Devices of three different electrode areas 200x200µm2, 300x300µm2 and 400x400µm2 have been carried out. Electrical measurements have demonstrated a capacitance value of 0.49pF, a quality factor of 156 and a tuning range of 13.99% at a DC bias range of 0-30V. The interaction between the RF signal level and the DC control signal has been studied and the operation limits established. The devices of 200x200µm2 can operate with RF signal level up to VRMS=96.6V, the devices of 300x300µm2 are able to work with RF signal level up to VRMS= 42.9V and the devices of 400x400µm2 are suitable to work up to VRMS=24.1V. The described results make the proposed MEMS tunable capacitors appropriate candidates for their use in RF signal circuits.
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Claude Lucat. Laboratoire IXL, Université de Bordeaux I, 351 cours de la Libération, 33405 TALENCE (France)
We recently developed a new process based on a thick-film sacrificial layer to release some parts of active or passive layers from the substrate. The efficiency of this simple and low cost method, derived from the standard screen-printing technology, has been demonstrated with the fabrication of a copper electrothermal microactuator. This device has been successfully operated with an ac voltage, up to a frequency of 10Hz. Moreover, preliminary experiments on suspended heating resistors, microchannels and piezoelectric transformer have shown promising results.
In the future, this original thick-film sacrificial layer process may well open new routes of investigation for hybrid MEMS, complementary to Silicon, LIGA, LTCC, ink jet or PCB ones
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M.Uriarte, AZTI -Tecnalia. Food Research Division. Txatxarramendi ugartea z/g 48395.
Sukarrieta, Bizkaia. Spain.
Nowadays there is a high demand of control rapid methods and devices to check food quality in food industry due to alerts occurred during the last years. Although there has been a high number of accurate methods and several sensor patents for contaminant or quality detection, there are very few applications in food industry which may represent a rentable system or which simply functions on a food matrix. One of the main difficulties is that control methods are normally tedious and require sample destruction and further extraction of the analyte and when devices are to be applied on line, for example, they are not sensible enough.
Micro and, currently, nanotechnology are thought to bring solutions to this matter. Nanomaterials may simplify transduction systems in biosensors, for instance, and because of the tiny size and their material characteristics, nanodevices could become systems of huge advantages (wireless, portability, etc.) for applications in food and food industry.
Nevertheless, nanotechnology is currently becoming a societal concern and the scientific community is starting to worrying about the future of the development of this new technology. Thus, one of the areas of study is focused on the risk assessment of the use of nanodevices and nanoparticles in food and food industry and the development of rapid toxicological methods to assure the safety use of nanomaterials.
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Albert Romano-Rodríguez, Eduard Figueras, Angel Rodríguez. Universidad de Barcelona. Depto. Electrónica, CNM, UPC
Small-size, low consumption and application specific analysis systems are gaining interest for their suitability in the realisation of fast and reliable on-site analysis. Chromatographic systems seem to be suitable candidates because they fulfil the requirements and because they can be fabricated using micro and nanofabrication tools.
In this work the development of the main parts of a gas microchromatographic system will be presented. Some approaches for the miniaturised fabrication of the different key components, namely the chromatographic column, the sensors and the preconcentrator, will be addressed. Finally proposals of the integration of the different components will be discussed.
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T. Contaret, S. Gomri, J.L. Seguin, K. Agur
Noise spectroscopy has been proposed as a mean of extracting a more selective response from chemiresistive gas sensors. It has been shown that, using noise spectroscopy, only one sensor can be enough to analyze the composition of a number of different gases. We report on the first investigations aiming to develop theoretical models and experimental methods for applying noise spectroscopy to metal oxide gas sensors. We analyse the possible sources of noise in metal oxide gas sensors and their coupling with the sensing mechanisms. Then, we propose, as a first step towards an overall model, a theoretical description of adsorptiondesorption noise in metal oxide gas sensors. Finally, we discuss the choice of a conditioner for noise measurements on gas sensors.
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Kepa Mayora, F J Blanco, M Agirregabiria, J Berganzo, J Elizalde, J. M. Ruano-
IKERLAN, Mondragón
This talk summarises our advances to fabricate a LabCard where sample preparation and detection take place. The approach consists of using just one fabrication procedure to produce all LabCard components. This procedure is based on the negative photoresist SU-8 to build fluidic control components, optical waveguides, electrodes, microfluidic channels and microreactors. The potential of this technology is being demonstrated by the integration of two biochemical assays in SU-8 devices: Capillary Gel Electrophoresis of proteins and Real Time PCR, as well as different polymer chips including microfluidic and sensing/actuating electrodes
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3ÈMES JORNADAS HISPANO FRANCESAS CMC2 - IBERNAM
Micro-Nano Tecnologías
Organizadas por la red española IBERNAM con la colaboración de la red francesa CMC2
9&10 noviembre 2006
CENTRO DE ESTUDIOS E INVESTIGACIONES TECNOLÓGICAS DE GUIPUZKOA (CEIT)
AZTI B.Alfaro
(Ver póster)
AZTI M.Uriarte
(Ver póster)
AZTI A.Barranco
(Ver póster)
CEIT J.Gracia
(Ver póster)
CNM E.Figueras
(Ver póster)
ICB E.Muñoz
(Ver póster)
IFA M.Aleixandre
(Ver póster)
IKERLAN Kepa Mayora
(Ver póster)
IKERLAN
(Ver póster)
10. Carbon nanotubes in nanomedicine: Synthesis, functionalization and characterization
INASMET L.Bilbao
(Ver póster)
Unizar Cat I.Pellejero
(Ver póster)
Unizar Cat M.Urbiztondo
(Ver póster)
13. Enhancement of the Photobleaching in Layer-by-Layer self-Assembled Optical Fiber Ph Sensors
UPN, P.Arregui
(Ver póster)
URV X.Correigt
(Ver póster)
URV, V.Khatko
(Ver póster)
16. Microrheometer on Lab-on-chip
Laboratoire IXL, N. Belmiloud
(Ver póster)
17. Detection Using Love Wave Inmunosensors
Laboratoire IXL, N. Moll
(Ver póster)